26/30551904 DC PDF
BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
Title (English):
26/30551904 DC
BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
- Document status:
- Active
- Format:
- Electronic (PDF)
- Publication date:
- July 3, 2026
- ICS:
- 31.080.01
- SKU:
- 26/30551904 DC