26/30551908 DC PDF
BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
Title (English):
26/30551908 DC
BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems - Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
- Document status:
- Active
- Format:
- Electronic (PDF)
- Publication date:
- July 3, 2026
- ICS:
- 31.080.01
- SKU:
- 26/30551908 DC