ASTM F399-00a PDF

Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002)

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Title (English):

ASTM F399-00a

Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002)

Document status:: Withdrawn
Format:: Electronic (PDF)
Publication date:: February 18, 2021
SKU:: ASTM F399-00a

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Abstract

ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers the determination of thickness of silicon heteroepitaxial or polysilicon layers deposited under conditions such that the interface region between ...

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ASTM F399-00a PDF

Abstract

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