BS EN 62047-1:2016 PDF

Semiconductor devices. Micro-electromechanical devices - Terms and definitions

First page of standard BS EN 62047-1:2016

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Title (English):

BS EN 62047-1:2016

Semiconductor devices. Micro-electromechanical devices - Terms and definitions

Document status:: Active
Format:: Electronic (PDF)
Publication date:: April 30, 2016
ICS:: 31.080.99
Technical committee:: CENELEC
SKU:: BS EN 62047-1:2016

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Abstract

What is BS EN 62047-1 - T erms and definitions for Micro-electromechanical devices (MEMS ) ?

BS EN 62047-1 is the first part of an international standard covering terms and definitions that enables standardization of terms, definitions and language related to micro-electromechanical devices. BS EN 62047-1 defines terms for micro-electromechanical devices including the process of production of such devices.

Who is BS EN 62047-1 - Terms and definitions for Micro-electromechanical devices ( MEMS) ?

BS EN 62047-1 on semiconductor devices useful for:

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BS EN 62047-1:2016 PDF

Abstract

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