BS EN 62047-10:2011 PDF

Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials

First page of standard BS EN 62047-10:2011

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Title (English):

BS EN 62047-10:2011

Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials

Document status:: Active
Format:: Electronic (PDF)
Publication date:: September 30, 2011
ICS:: 31.080.99
Technical committee:: CENELEC
SKU:: BS EN 62047-10:2011

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Abstract

What is BS EN 62047-10 - Micro-pillar compression test for MEMS materials about?

BS EN 62047-10 is the 10th part of the multi-series standard used for Semiconductor devices. by using BS EN 62047-10 you can manufacture good quality MEMS devices. BS EN 62047-10 specifies a micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate the effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a

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Abstract

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