Semiconductor devices. Micro-electromechanical devices - Test method of bonding strength between PDMS and glass
Semiconductor devices. Micro-electromechanical devices - Test method of bonding strength between PDMS and glass
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What is BS EN 62047-15 - Bonding strength between PDMS and glass about?
BS EN 62047-15 is the 15th part of a multi-series standard used for semiconductor devices. BS EN 62047-15 describes the test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone-based rubber, PDMS, is used for the building of chip-based microfluidic devices fabricated using lithography and replica moulding processes. The problem of bonding strength is mainly for high-pressure applications as in the case of certain peristaltic pump designs where an off-chip compressed air supply is used to drive the fluids in micro-channels created by a twin layer, one formed by bondage between glass...
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