BS EN 62047-17:2015 PDF

Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films

Title (English):

BS EN 62047-17:2015

Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films

Document status:

Active

Format:

Electronic (PDF)

Publication date:

July 31, 2015

ICS:

31.080.99

Technical committee:

CENELEC

SKU:

BS EN 62047-17:2015