BS EN 62047-21:2014 PDF

Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

Title (English):

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

Document status:

Active

Format:

Electronic (PDF)

Publication date:

October 31, 2014

ICS:

31.080.99

Technical committee:

CENELEC

SKU:

BS EN 62047-21:2014