BS EN 62047-3:2006 PDF

Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing

Title (English):

BS EN 62047-3:2006

Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing

Document status:

Active

Format:

Electronic (PDF)

Publication date:

November 30, 2006

ICS:

31.080.99

Technical committee:

CENELEC

SKU:

BS EN 62047-3:2006