BS EN 62047-4:2010 PDF

Semiconductor devices. Micro-electromechanical devices - Generic specification for MEMS

First page of standard BS EN 62047-4:2010

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Title (English):

BS EN 62047-4:2010

Semiconductor devices. Micro-electromechanical devices - Generic specification for MEMS

Document status:: Active
Format:: Electronic (PDF)
Publication date:: November 30, 2010
ICS:: 31.080.99
Technical committee:: CENELEC
SKU:: BS EN 62047-4:2010

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Abstract

What is BS EN 62047-4 - Specification for Micro-electromechanical devices (MEMS) about?

BS EN 62047-4 is the fourth part of the multi-series used for Semiconductor devices. BS EN 62047-4 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro T...

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BS EN 62047-4:2010 PDF

Abstract

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