BS EN 62047-8:2011 PDF
Semiconductor devices. Micro-electromechanical devices - Strip bending test method for tensile property measurement of thin films
Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Strip bending test method for tensile property measurement of thin filmsTitle (English):
BS EN 62047-8:2011
Semiconductor devices. Micro-electromechanical devices - Strip bending test method for tensile property measurement of thin films
- Document status:
- Active
- Format:
- Electronic (PDF)
- Publication date:
- June 30, 2011
- ICS:
- 31.080.99
- Technical committee:
- CENELEC
- SKU:
- BS EN 62047-8:2011