BS EN ISO 14644-14:2016 PDF

ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration

First page of standard BS EN ISO 14644-14:2016

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Title (English):

BS EN ISO 14644-14:2016

ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration

Document status:: Withdrawn
Format:: Electronic (PDF)
Publication date:: October 31, 2016
ICS:: 13.040.35
Technical committee:: CEN
SKU:: BS EN ISO 14644-14:2016

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Abstract

1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment , process equipment , components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO 14644:

— assessment of suitability with respect to biocontamination;

— testing for suitability of decontamination agents and techniques;

— cleanability of equipment and materials;

— requirements on design of equipment and selection of materials;

— physical properties of materials (e.g. electrostatic, thermal properties);

...

Related standards

Mentioned in the description and other BS standards

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO 14644:

— assessment of suitability with respect to biocontamination;

— testing for suitability of decontamination agents and techniques;

— cleanability of equipment and materials;

— requirements on design of equipment and selection of materials;

— physical properties of materials (e.g. electrostatic, thermal properties);

...

BS EN ISO 14644-14:2016 PDF

Abstract

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Abstract

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