BS EN ISO 14644-15:2017 PDF

Cleanrooms and associated controlled environments - Assessment of suitability for use of equipment and materials by airborne chemical concentration

First page of standard BS EN ISO 14644-15:2017

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Title (English):

BS EN ISO 14644-15:2017

Cleanrooms and associated controlled environments - Assessment of suitability for use of equipment and materials by airborne chemical concentration

Document status:: Withdrawn
Format:: Electronic (PDF)
Publication date:: January 31, 2018
ICS:: 13.040.35
Technical committee:: CEN
SKU:: BS EN ISO 14644-15:2017

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Abstract

1 Scope This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8). The following are outside the scope of this document:

— health and safety requirements;

— compatibility with cleaning agents and techniques;

— cleanability;

— biocontamination;

— specific requirements of equipment and materials for processes and products;

— design details of equipment .

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BS EN ISO 14644-15:2017 PDF

Abstract

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Abstract

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