BS IEC 62047-42:2022 PDF

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Title (English):

BS IEC 62047-42:2022

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Document status:

Active

Format:

Electronic (PDF)

Publication date:

October 24, 2022

ICS:

31.080.99

SKU:

BS IEC 62047-42:2022