BS IEC 62047-45:2025 PDF

Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures

First page of standard BS IEC 62047-45:2025

Open preview (PDF)

Title (English):

BS IEC 62047-45:2025

Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures

Document status:: Active
Format:: Electronic (PDF)
Publication date:: March 31, 2025
ICS:: 31.080.99
SKU:: BS IEC 62047-45:2025

Delivery type:

Full version50 €Read online 24h10 €Read online 72h15 €

Document language:

enru

Delivery time:Immediate download

Price:50 €

Abstract

1 Scope This part of IEC 62047 specifies the requirements and testing method to measure the impact resistance of nanostructures which are fabricated by micromachining technology used in silicon-based micro-electromechanical system (MEMS). This document is applicable to the in-situ impact resistance measurement of nanostructures manufactured by microelectronic technology process and other micromachining technology. In the production of MEMS devices, due to the micro/nano size, the non-ideal effect of fabrication is greatly amplified compared with the macroscale. Surface defects, line width loss, and residual stress can occur in the fabricated object, resulting in severe fluctuations in the mechanical strength of MEMS devices. This document specifies an in-situ measurement method for the impact resistance of nanostructures based on MEMS technology to extract the impact strength of actual manufactured structures. This test method does not need intricated instruments (such as scanning probe microscopy and nanoindenter) and special test specimens. Since the in-situ on-chip tester in this document can be implanted in device fabrication as a standard detection pattern, this document can provide a bridge, by which the fabrication part can give some quantitative reference for the design part.

Related standards

Mentioned in the description and other BS standards

BS IEC 62047-45:2025 PDF

Abstract

Related standards

Abstract

Related standards

Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression t…

Safety of earth-moving machinery - Specification for lighting, signalling and marking lights, and reflex-refl…

Airframe rolling bearings. Technical specification.

Road vehicles. Types. Terms and definitions.

Water quality. Evaluation of the ´ultimate´ anaerobic biodegradability of organic compounds in digested sludg…

Petroleum and natural gas industries. Drilling and production equipment. Hoisting equipment. Hoisting equipme…

Specification for lifts, escalators, passenger conveyors and paternosters. Building construction requirements.

Timber structures. Test methods. Cyclic testing of joints made with mechanical fasteners.