BS IEC 62047-53:2025 PDF

Semiconductor devices. Micro-electromechanical devices - MEMS electrothermal transfer device

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - MEMS electrothermal transfer device

Title (English):

BS IEC 62047-53:2025

Semiconductor devices. Micro-electromechanical devices - MEMS electrothermal transfer device

Document status:

Active

Format:

Electronic (PDF)

Publication date:

October 31, 2025

ICS:

31.080.99

SKU:

BS IEC 62047-53:2025