BS ISO 14644-12:2018 PDF

Cleanrooms and associated controlled environments. Specifications for monitoring air cleanliness by nanoscale particle concentration.

Open preview (PDF)Cleanrooms and associated controlled environments. Specifications for monitoring air cleanliness by nanoscale particle concentration.

Title (English):

BS ISO 14644-12:2018

Cleanrooms and associated controlled environments. Specifications for monitoring air cleanliness by nanoscale particle concentration.

Document status:

Active

Format:

Electronic (PDF)

Number of pages:

20

Publication date:

September 6, 2018

SKU:

BS ISO 14644-12:2018