BS ISO 16413:2020 PDF

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting.

Open preview (PDF)Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting.

Title (English):

BS ISO 16413:2020

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting.

Document status:

Active

Format:

Electronic (PDF)

Number of pages:

42

Publication date:

August 18, 2020

SKU:

BS ISO 16413:2020