BS ISO 17973:2016 PDF

Surface chemical analysis. Medium-resolution Auger electron spectrometers. Calibration of energy scales for elemental analysis

First page of standard BS ISO 17973:2016

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Title (English):

BS ISO 17973:2016

Surface chemical analysis. Medium-resolution Auger electron spectrometers. Calibration of energy scales for elemental analysis

Document status:: Withdrawn
Format:: Electronic (PDF)
Publication date:: September 30, 2016
ICS:: 71.040.40
SKU:: BS ISO 17973:2016

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Abstract

1 Scope This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

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Abstract

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