Overview
EN ISO 25178-607:2019 (ISO 25178-607:2019) is a Geometrical Product Specification (GPS) standard that defines the nominal characteristics of non‑contact confocal microscopy instruments used for areal surface texture (surface topography) measurement. The document describes the influence quantities and metrological characteristics of confocal microscope systems that produce optically sectioned areal topography images. Because surface profiles can be extracted from areal images, the standard’s guidance is also applicable to profiling measurements.
Key topics
- Instrument characteristics and influence quantities: Describes the factors that affect confocal measurement performance (optical sectioning, illumination/detection geometry, scanner behavior).
- Confocal measurement concepts: Definitions and explanations of terms such as axial scan, axial response, axial steps, full width at half maximum (FWHM), background offset, illumination pattern, detection pattern, and in‑plane scanning.
- Metrological descriptors: Guidance for characterizing slice thickness (FWHM), maximum signal position, background offset and other signal features that influence accuracy and resolution of areal measurements.
- Informative annexes: Annex A–D cover classification of in‑plane scanning techniques, theory of operation of confocal microscopes, issues with thin and thick films, and the relation to the GPS matrix model.
- Non‑normative guidance: The standard contains informative material (including descriptions of patented methods) to help users understand operating principles without implying IP licensing.
Applications
- Selection, specification and acceptance testing of confocal microscopy systems for surface topography metrology.
- Defining measurement system capabilities for quality control in precision manufacturing (optics, microelectronics, medical devices, tribology).
- Supporting traceable areal texture measurement and the extraction of surface profiles from confocal topography maps.
- Informing instrument manufacturers, calibration labs and test houses about the key characteristics that affect measurement uncertainty and resolution.
Who uses this standard
- Metrology laboratories and calibration facilities
- Instrument designers and manufacturers of confocal microscopes
- Quality engineers and R&D teams working on surface texture and functional surfaces
- Standards bodies and conformity assessment organizations
Related standards
Keywords: EN ISO 25178-607:2019, ISO 25178-607, confocal microscopy, areal surface texture, surface topography, axial scan, FWHM, non-contact instruments, GPS.
