Overview
IEC 60747-14-11:2021 specifies test methods, definitions and configurations for evaluating surface acoustic wave (SAW)-based integrated semiconductor sensors used to measure ultraviolet (UV) radiation, illumination (visible light) and temperature. The standard covers terminology, device structure (resonator and delay-line SAW types), and measurement procedures for both DC characteristics and RF characteristics (including direct mode and differential amplifier mode based on feedback oscillation). Devices addressed include integrated multi-light sensor arrays and reference sensor elements; devices governed by TC 49 (piezoelectric/dielectric frequency-control devices) are excluded.
Keywords: IEC 60747-14-11:2021, surface acoustic wave, SAW-based sensors, ultraviolet sensor, visible-light sensor, RF test methods, DC characteristics, frequency shift.
Key Topics and Requirements
- Terms and definitions: Standardized vocabulary for SAW devices, interdigital transducer (IDT), centre frequency, phase shift, frequency shift, insertion loss and related parameters.
- Device structures: Descriptions of SAW resonator and SAW delay-line sensor elements, and integrated multi-light sensor configurations including reference elements to compensate temperature effects.
- Sensitive layers: Guidance on typical semiconductor sensing materials (e.g., ZnO, ZnS for UV; CdS, PbS for visible light) and their role in frequency/phase/delay changes.
- Test conditions: Environmental and setup requirements (e.g., darkroom considerations, starting conditions and instrumentation requirements) to ensure repeatable measurements.
- Measurement methods:
- DC characteristics: I–V type measurements and evaluation of light-induced DC responses of sensor elements.
- RF characteristics: Measurement of centre/resonance frequency, frequency shift, phase and insertion loss. Includes two RF measurement modes:
- Direct mode
- Differential amplifier mode (based on feedback oscillation) for enhanced sensitivity and noise rejection.
- Performance parameters: Procedures to evaluate hysteresis, frequency shift vs. light on/off states, and other characteristic responses.
Applications and Who Uses It
- Semiconductor manufacturers designing SAW-based UV/illumination/temperature sensors.
- Sensor designers and integrators developing smart lighting, environmental monitoring, industrial IoT, wearable and consumer devices that require compact optical/temperature sensing.
- Test laboratories and quality assurance teams performing compliance, reliability and performance characterization.
- Procurement and regulatory bodies specifying testable performance criteria for SAW-based sensor components.
Practical benefits: standardized, repeatable test procedures for RF/DC performance, improved comparability between devices, and guidance for designing reference and multi-sensor arrays.
Related Standards
- IEC 63041-1 - Piezoelectric sensors: Generic specifications
- IEC 63041-2 - Piezoelectric sensors: Chemical and biochemical sensors
Note: IEC 60747-14-11 excludes devices handled by TC 49 (piezoelectric, dielectric and electrostatic frequency control and detection materials).
Open preview (PDF)Semiconductor devices - Part 14-11: Semiconductor sensors - Test method of surface acoustic wave-based integrated sensors for measuring ultraviolet, illumination and temperature
