Overview
IEC 60749-7:2011 is an international standard developed by the International Electrotechnical Commission (IEC) focusing on semiconductor devices. This standard defines the mechanical and climatic test methods specifically for measuring internal moisture content and analyzing other residual gases inside hermetically sealed semiconductor packages made of metal or ceramic. The standard is essential for assessing the quality of sealing processes and the long-term chemical stability of the atmosphere inside sealed semiconductor devices.
Primarily used for high-reliability applications such as military and aerospace, this measurement is critical as moisture and residual gases can affect device performance and longevity. The testing method described is destructive, ensuring detailed insight into the package environment.
Key Topics
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Scope and Applicability
Applies to semiconductor devices sealed hermetically with metal or ceramic packages. Ensures robust assessment predominantly for high-reliability sectors.
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Internal Moisture Measurement
The standard specifies measurement of water vapor concentration in parts per million by volume (ppmv) inside the package. Moisture is a key indicator of hermetic seal quality and internal atmosphere stability.
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Gas Analysis by Mass Spectrometry
A mass spectrometer method is employed to detect water vapor and other residual gases from 1 to 100 atomic mass units (AMU). The system has defined detection limits with a signal-to-noise ratio of at least 20:1, ensuring precise measurements at ppmv levels.
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Calibration and Accuracy
Annual system calibrations with multiple moisture levels (2,000 ppmv to 8,000 ppmv) are required to confirm linear response and sensitivity. Daily calibration checks against dew point hygrometers maintain accuracy within ±250 ppmv. The apparatus includes pressure sensing aligned with dew point measurements for reliable moisture concentration calculation.
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Residual Gases Analysis
Beyond moisture, the standard requires calibration for gases present at more than 0.01% volume concentration. Typical gases include nitrogen, oxygen, helium, hydrogen, ammonia, and fluorocarbons, each with specified calibration concentrations.
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Destructive Testing Protocol
The package is opened using a vacuum chamber and piercing arrangement, allowing gas extraction for analysis. This method emphasizes precise monitoring of internal gases controlling hermeticity integrity.
Applications
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Semiconductor Manufacturing Quality Control
Verifying the hermetic seal quality and detecting internal moisture or harmful residual gases help prevent premature device failure and degradation.
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Military & Aerospace Electronics
Essential for semiconductors deployed in harsh environments where long-term reliability is critical. Moisture and residual gas content directly impact device robustness under extreme stresses.
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Failure Analysis and Reliability Testing
Detects manufacturing defects like compromised seals or contamination that may lead to device failure over time.
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Process Validation and Improvement
Provides feedback on hermetic sealing procedures for manufacturers, guiding process controls to enhance product reliability.
Related Standards
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MIL-STD-750 Method 1018 and MIL-STD-883 Method 1018
IEC 60749-7:2011 is aligned with these latest military standard testing methods for moisture and residual gas analysis, ensuring compatibility and acceptance in high-reliability sectors.
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IEC 60749 Series
Covers various mechanical and climatic test methods for semiconductor devices, with Part 7 specifically addressing moisture and gas content measurement.
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ISO/IEC Directives Part 2
Governs the drafting and structure of IEC standards, under which IEC 60749-7 is prepared to ensure consistent and transparent documentation.
Keywords: IEC 60749-7, internal moisture measurement, semiconductor device testing, hermetic sealing, residual gases analysis, mass spectrometry method, high reliability semiconductor testing, moisture content ppmv, aerospace electronics, military semiconductor standards, hermetic package testing, moisture calibration, gas analysis standards.
Open preview (PDF)Semiconductor devices - Mechanical and climatic test methods - Part 7: Internal moisture content measurement and the analysis of other residual gases
