IEC 62047-28:2017 PDF
Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
Open preview (PDF)Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devicesSemiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
- Document status:
- Active
- Format:
- Electronic (PDF)
- Number of pages:
- 17
- Publication date:
- January 20, 2017
- Edition:
- IEC IS 62047 edition 1 version 1
- ICS:
- 31.080.99
IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
Technical details
- Technical committee
- TC 47 - Semiconductor devices
- SKU
- IEC 62047-28:2017
