Overview
ISO 10692-2:2001 specifies mandatory type-testing and acceptance criteria for valve-to-cylinder connections used in the micro‑electronics industry, where the highest levels of gas purity and particle control are required. Part 2 of ISO 10692 focuses on the sequence of safety tests, functional/durability tests (recommended), and the required test reporting for valve-to-cylinder assemblies intended for specialty gases and gas mixtures used in microelectronics manufacturing.
Key topics and technical requirements
- Scope: Prototype type testing of the valve-to-cylinder connection to demonstrate safety, leak integrity and preservation of gas purity for micro‑electronics applications.
- Test specimen: Typical test on a cylinder ≈50 L water capacity, up to 200 bar service pressure (or appropriately sized cylinder if the connection is designed for smaller volumes).
- Mandatory safety test sequence:
- Hydraulic cycling: 200 cycles from atmospheric pressure to test pressure (specified rate Δp/Δt ≤ 40 bar/min).
- Drop/impact tests: six drops with 60° rotation between drops, performed on a concrete surface per ISO 11117 conditions.
- Shock and rolling tests: shock tests per ISO 11117 and rolling down a 1.50 m ramp at 30° repeated (including reverse rotation).
- Leak checks after each pressurization step using a visible leak detection method or equivalent sensitive methods (detection sensitivity quoted in the standard).
- Recommended functional/durability tests (Annex A):
- Pressure leak tests at 1 bar, 10 bar and 120 % of working pressure using helium leak testing.
- Thermal and pressure cycling, drying cycles (e.g., 40 vacuum drying cycles up to ~100 °C), vibration testing and multiple assembly/disassembly cycles.
- Helium leak test procedure (Annex B): enclosure of the joint with detection focused on joint leakage; recommended detection limit ≤ 10 mbar·L/s for micro‑electronics use.
- Vibration test (Annex C): three‑axis vibration profile with specified spectral density and one hour per axis (see Annex C for spectrum).
- Reporting: Written test report with sketches, parts lists, material certificates and signatures from test personnel. Any material change requires a new type test.
Practical applications and users
- Ensures valve-to-cylinder connections meet stringent cleanliness, leak-tightness and mechanical integrity required by:
- Valve and cylinder manufacturers designing fittings for ultra‑high purity gases
- Gas suppliers and specialty gas packagers for microelectronics fabs
- Test laboratories performing type approval and qualification
- Procurement, QA and safety engineers in semiconductor and MEMS manufacturing
- Helps reduce particle generation during valve installation, maintain gas purity in process tools, and provide documented evidence of compliance for purchasing/specification.
Related standards
Keywords: ISO 10692-2, gas cylinders, valve connections, micro-electronics industry, type testing, helium leak test, vibration test, valve-to-cylinder connection, gas purity, valve qualification.
Open preview (PDF)Gas cylinders — Gas cylinder valve connections for use in the micro-electronics industry — Part 2: Specification and type testing for valve to cylinder connections