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ISO 18115-3:2022 PDF

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

First page of standard ISO 18115-3:2022Open preview (PDF)Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Title (English):
ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

Document status:
Active
Format:
Electronic (PDF)
Number of pages:
35
Publication date:
June 30, 2022
Edition:
ISO IS 18115 edition 1 version 1
ICS:
01.040.71
Description (English):

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

Technical details

Technical committee
ISO/TC 201/SC 1 - Terminology
SKU
ISO 18115-3:2022

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