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ISO 25164:2026 PDF

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Title (English):
ISO 25164:2026

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Document status:
Active
Format:
Electronic (PDF)
Number of pages:
6
Publication date:
August 3, 2026
Edition:
ISO IS 25164 edition 1 version 1
ICS:
25.220.40
Description (English):

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering. This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.

Technical details

Technical committee
ISO/TC 107/SC 9 - Physical vapor deposition coatings
SKU
ISO 25164:2026

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