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SIST EN ISO 25178-604:2025 PDF

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2025)

Title (English):
SIST EN ISO 25178-604:2025

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2025)

Document status:
Active
Format:
Electronic (PDF)
Number of pages:
31
Publication date:
March 13, 2025
Edition:
ISO 25178-604:2025
ICS:
17.040.20
Description (English):

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Technical details

Technical committee
ISEL - Mechanical elements
SKU
SIST EN ISO 25178-604:2025

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