BS IEC 62047-29:2017 PDF
Semiconductor devices. Micro-electromechanical devices - Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Electromechanical relaxation test method for freestanding conductive thin-films under room temperatureSemiconductor devices. Micro-electromechanical devices - Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
- Document status:
- Active
- Format:
- Electronic (PDF)
- Publication date:
- March 31, 2018
- ICS:
- 31.080.01
- Technical committee:
- CENELEC
- SKU:
- BS IEC 62047-29:2017