BS IEC 62047-30:2017 PDF

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Open preview (PDF)Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Title (English):

BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Document status:

Active

Format:

Electronic (PDF)

Publication date:

October 31, 2017

ICS:

31.080.99

SKU:

BS IEC 62047-30:2017