BS IEC 62047-32:2019 PDF

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

First page of standard BS IEC 62047-32:2019

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Title (English):

BS IEC 62047-32:2019

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

Document status:: Active
Format:: Electronic (PDF)
Publication date:: January 31, 2019
ICS:: 31.080.99
Technical committee:: CENELEC
SKU:: BS IEC 62047-32:2019

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Abstract

What is BS IEC 62047 ‑ 32 - MEMS resonator testing about?

MEMS resonators are small electromechanical structures that vibrate at high frequencies. They are used for timing references, signal filtering, mass sensing, biological sensing, motion sensing, and other diverse applications. BS IEC 62047 ‑ 32 is part of the IEC 62047 series on semiconductor devices. BS IEC 62047 ‑ 32

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BS IEC 62047-32:2019 PDF

Abstract

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Abstract

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