BS IEC 63068-3:2020 PDF

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using photoluminescence

Open preview (PDF)Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using photoluminescence

Title (English):

BS IEC 63068-3:2020

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using photoluminescence

Document status:

Active

Format:

Electronic (PDF)

Publication date:

July 31, 2020

ICS:

31.080.01

SKU:

BS IEC 63068-3:2020