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IEC 62047-1:2016 PDF

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

First page of standard IEC 62047-1:2016Open preview (PDF)Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Title (English):
IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Document status:
Active
Format:
Electronic (PDF)
Number of pages:
66
Publication date:
January 6, 2016
Edition:
IEC IS 62047 edition 2 version 1
ICS:
31.080.99
Description (English):

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

Technical details

Technical committee
SC 47F - Micro-electromechanical systems
SKU
IEC 62047-1:2016

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