Overview
IEC 62047-48:2024 defines a standardized test method for determining solution concentration by optical absorption using a MEMS fluidic device. Part 48 of the IEC 62047 series specifies how to measure solution concentration within microfluidic channels using an optical absorption approach based on the Beer–Lambert law. The standard covers test specimen configuration, device layer stacks and micro‑channel geometry, measurement principles, and the required reporting of measured parameters.
Key topics and requirements
- Principle: Uses the Beer–Lambert law to relate absorbance to molar concentration, optical path length and the molar absorption (extinction) coefficient.
- Measured parameters to record:
- Absorbance (A) and the corresponding transmittance.
- Optical path length (b) through the MEMS fluidic channel.
- Molar absorption coefficient (a) determined from known-concentration solutions.
- Surface temperature of the MEMS fluidic device during measurement (temperature dependence is highlighted).
- Calculated molar concentration (c) as derived from the standard’s formula.
- Test specimen and measuring unit: Describes test specimen requirements, configuration of concentration measuring units, layer stack considerations and micro-channel size/shape important for reproducible optical path length and signal quality.
- Test procedure and data analysis: Defines steps for preparing specimens, measuring incident and transmitted light, calculating absorption parameters, and preparing a test report with required entries.
- Documentation: The standard specifies the information that must be recorded in the test report (measured absorbance, optical path length, molar absorption coefficient, surface temperature and calculated concentration).
Applications and users
- Who uses it:
- MEMS designers and manufacturers developing microfluidic and bio‑MEMS devices.
- Test and calibration laboratories performing optical concentration measurements on lab‑on‑chip and micro‑reactor systems.
- Process engineers and quality control teams in semiconductor, biotech and chemical instrumentation industries.
- Practical applications:
- In‑situ monitoring of reagent or analyte concentration in microfluidic assays.
- Calibration and validation of optical detection regions in MEMS fluidic devices.
- Development of compact, cost‑effective lab‑on‑chip sensors for diagnostics, environmental monitoring and chemical analysis.
Related standards
- Part of the IEC 62047 series for semiconductor micro‑electromechanical devices (microfluidics and MEMS). Users should consult other parts of the IEC 62047 series and relevant measurement or laboratory standards for complementary test and safety requirements.
Keywords: IEC 62047-48, MEMS fluidic device, optical absorption, solution concentration, Beer–Lambert law, molar absorption coefficient, microfluidic, bio‑MEMS, lab‑on‑chip.
Open preview (PDF)Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device
