Overview
ISO 10692-1:2001 specifies gas cylinder valve outlet connections for the micro‑electronics industry where extreme cleanliness and particle‑free performance are required. Part 1 covers the geometry, materials, sealing components and performance requirements for outlet connections (including 630/640 and 710/720 series variants). The standard is focused on high‑purity and safety aspects for gases and gas mixtures used in semiconductor and related precision manufacturing.
Key topics and technical requirements
- Scope and purpose: Outlet connections for refillable gas cylinders intended for micro‑electronics applications, with mandatory outlet allocations for many single gases (Annex A).
- Materials and surface finish:
- Valve and nipple recommended material: AISI 316L, microfinished, hardness ≥ 130 HBW (ISO 6506‑1).
- Union nut recommended: AISI 304, silver‑plated threads.
- Gasket typically Ni‑200 (nickel), fully annealed with hardness 80–100 HBW and sealing area surface finish ≤ 0.8 µm turned.
- Sealing and leak performance:
- The standard requires very low helium leak rates for both outboard and inboard leakage when tested at specified conditions (leak test pressure and tightening torque are defined in the document). Tests reference helium at 137 bar and a specified tightening torque (50 N·m) for performance verification.
- Mechanical design and anti‑rotation:
- Detailed assembly geometry, keys/keyways or pin anti‑rotation devices to prevent rotation during assembly.
- Union nut designs include vent holes and provisions for blind plugs and retaining clips.
- Dimensions and thread profile:
- Detailed dimensional drawings for 630/640 and 710/720 series nipples, valves and union nuts.
- Thread profile: 60° thread (per ISO 68‑2) with modified truncations; pitch P = 1.814 mm and specific nominal diameters listed.
- Gasket, clip and blind plug: Dimensioned gasket and clip details plus instructions for transport blocking plugs (metal and organic gasket options).
Applications and users
ISO 10692-1 is used by:
- Cylinder and valve manufacturers designing high‑purity gas fittings for semiconductor fabs.
- OEMs of gas delivery equipment and tool builders in micro‑electronics.
- Quality, safety and procurement teams specifying compatible, leak‑tight cylinder connections for ultra‑high‑purity gases and mixtures.
- Gas suppliers and service companies providing cylinders for semiconductor, MEMS and nanofabrication processes.
This standard ensures interchangeability, contamination control, and safety for critical gas delivery in micro‑electronics manufacturing.
Related standards
Keywords: ISO 10692-1, gas cylinder valve connections, micro‑electronics industry, outlet connections, high‑purity gas, helium leak rate, Ni‑200 gasket, AISI 316L, 630 series, 710 series.
Open preview (PDF)Gas cylinders — Gas cylinder valve connections for use in the micro-electronics industry — Part 1: Outlet connections