ISO 11505:2025 - Overview
ISO 11505:2025 specifies general procedures for quantitative compositional depth profiling of surface films using glow discharge optical emission spectrometry (GD-OES). The standard covers the GD-OES method for determining film thickness, mass per unit area, and chemical composition of surface layers by converting time‑resolved emission intensities (qualitative depth profiles) into quantitative mass fractions versus depth using calibrated sputtering rates and calibration functions.
Note: the document describes general quantification procedures for GD‑OES depth profiling and is not directly applicable to every individual material with varying thicknesses or element sets.
Key technical topics and requirements
- Principle: continuous cathodic sputtering (DC or RF glow discharge), plasma excitation, time‑resolved spectral measurement, and conversion to quantitative depth profiles via calibration.
- Apparatus:
- Grimm‑type or similar glow discharge source (DC or RF).
- Simultaneous optical spectrometer with array detectors (CCD, CMOS, CID) - sequential monochromators are not suitable.
- Hollow anode inner diameter recommended between 1 mm and 8 mm.
- Optional cooling for thin specimens (e.g., circulating block).
- Data acquisition: time‑resolved digital readout; recommended acquisition speeds ≥100 measurements/s per spectral channel (≥50 acceptable for many applications).
- Discharge settings: procedures for setting DC and RF parameters (current/voltage/power, pressure, bias) and minimum performance requirements (cleanliness, repeatability, detection limits).
- Calibration & validation:
- Use of calibration specimens (various substrate types listed) and validation specimens.
- Determination of sputtering rate, emission intensity measurements, calculation of calibration constants (Annex A), and validation of calibration accuracy.
- Suggested spectral lines are provided (Annex B).
- Results & reporting: expression of quantitative depth profiles, total coating mass per unit area, average mass fractions, precision, and required test‑report elements.
Practical applications and users
ISO 11505:2025 is relevant for:
- Surface chemical analysts and materials scientists conducting compositional depth profiling.
- Quality control and failure‑analysis laboratories assessing coatings, platings, thin films, and layered surface treatments.
- Instrument manufacturers and calibration labs developing GD‑OES methods and reference materials.
- R&D teams in automotive, electronics, metallurgy, and surface‑finishing industries requiring reliable thickness and composition data.
Benefits include standardized workflows for calibration, reproducible quantification, and clearer reporting of GD‑OES depth profiles.
Related standards
- ISO 14707 - Surface chemical analysis - GD‑OES introduction to use (normative reference within ISO 11505:2025).
Open preview (PDF)Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
