ISO 11952:2014 PDF
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Open preview (PDF)Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systemsTitle (English):
ISO 11952:2014
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
- Document status:
- Withdrawn
- Format:
- Electronic (PDF)
- Number of pages:
- 58
- Publication date:
- May 12, 2014
- Edition:
- ISO IS 11952 edition 1 version 1
- ICS:
- 71.040.40
Description (English):
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
Technical details
- Technical committee
- ISO/TC 201/SC 9 - Scanning probe microscopy
- SKU
- ISO 11952:2014
