ISO 14644-10:2013 PDF
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Open preview (PDF)Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentrationTitle (English):
ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
- Document status:
- Withdrawn
- Format:
- Electronic (PDF)
- Number of pages:
- 30
- Publication date:
- March 1, 2013
- Edition:
- ISO IS 14644 edition 1 version 1
- ICS:
- 13.040.35
Description (English):
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
Technical details
- Technical committee
- ISO/TC 209 - Cleanrooms and associated controlled environments
- SKU
- ISO 14644-10:2013
