ISO 14644-2:2015 PDF
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Open preview (PDF)Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentrationCleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- Document status:
- Active
- Format:
- Electronic (PDF)
- Number of pages:
- 14
- Publication date:
- December 9, 2015
- Edition:
- ISO IS 14644 edition 2 version 1
- ICS:
- 13.040.35
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
Technical details
- Technical committee
- ISO/TC 209 - Cleanrooms and associated controlled environments
- SKU
- ISO 14644-2:2015
