ISO 16700:2004 PDF
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Title (English):
ISO 16700:2004
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
- Document status:
- Withdrawn
- Format:
- Electronic (PDF)
- Number of pages:
- 16
- Publication date:
- March 5, 2004
- Edition:
- ISO IS 16700 edition 1 version 1
- ICS:
- 37.020
Description (English):
ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
Technical details
- Technical committee
- ISO/TC 202/SC 4 - Scanning electron microscopy
- SKU
- ISO 16700:2004
