ISO 17973:2002 PDF
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
- Document status:
- Withdrawn
- Format:
- Electronic (PDF)
- Number of pages:
- 11
- Publication date:
- October 24, 2002
- Edition:
- ISO IS 17973 edition 1 version 1
- ICS:
- 71.040.40
ISO 17973:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Technical details
- Technical committee
- ISO/TC 201/SC 7 - Electron spectroscopies
- SKU
- ISO 17973:2002
