ISO 17973:2024 PDF
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Open preview (PDF)Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysisSurface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
- Document status:
- Active
- Format:
- Electronic (PDF)
- Number of pages:
- 11
- Publication date:
- July 3, 2024
- Edition:
- ISO IS 17973 edition 3 version 1
- ICS:
- 71.040.40
This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Technical details
- Technical committee
- ISO/TC 201/SC 7 - Electron spectroscopies
- SKU
- ISO 17973:2024


