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ISO 17973:2024 PDF

Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

First page of standard ISO 17973:2024Open preview (PDF)Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Title (English):
ISO 17973:2024

Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

Document status:
Active
Format:
Electronic (PDF)
Number of pages:
11
Publication date:
July 3, 2024
Edition:
ISO IS 17973 edition 3 version 1
ICS:
71.040.40
Description (English):

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Technical details

Technical committee
ISO/TC 201/SC 7 - Electron spectroscopies
SKU
ISO 17973:2024

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