ISO 20411:2018 PDF
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
Open preview (PDF)Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometrySurface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
- Document status:
- Active
- Format:
- Electronic (PDF)
- Number of pages:
- 15
- Publication date:
- March 9, 2018
- Edition:
- ISO IS 20411 edition 1 version 1
- ICS:
- 71.040.40
ISO 20411:2018 specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector-type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also includes a correction method for saturated intensity caused by the dead time of the detector. The correction can increase the intensity range for 95 % linearity so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid. ISO 20411:2018 does not apply to time of flight mass spectrometers. ISO 20411:2018 is only applicable to elements with minor isotopes. It is not applicable if the element is monoisotopic or contains isotopes with equal abundances.
Technical details
- Technical committee
- ISO/TC 201/SC 6 - Secondary ion mass spectrometry
- SKU
- ISO 20411:2018


