ISO 22493:2014 PDF

Microbeam analysis — Scanning electron microscopy — Vocabulary

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Title (English):

ISO 22493:2014

Microbeam analysis — Scanning electron microscopy — Vocabulary

Document status:: Active
Format:: Electronic (PDF)
Number of pages:: 20
Publication date:: April 9, 2014
Edition:: ISO IS 22493 edition 2 version 1
ICS:: 01.040.37

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Description (English):

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

Technical details

Technical committee: ISO/TC 202/SC 1 - Terminology
SKU: ISO 22493:2014

Abstract

Overview

ISO 22493:2014 - Microbeam analysis - Scanning electron microscopy - Vocabulary defines the standardized terminology used in the practice of scanning electron microscopy (SEM). Published by ISO/TC 202 (Microbeam analysis), this second edition provides a systematic, hierarchical set of terms covering the physical basis of SEM, instrumentation, image formation and processing, image interpretation and analysis, and measurement/calibration of magnification and resolution. The standard is intended to ensure consistent SEM vocabulary across standards, technical documents, laboratory procedures, training materials and procurement specifications.

Key Topics

ISO 22493:2014 organizes and defines terms that underpin SEM practice. Representative technical topics and entries include:

Physical basis of SEM: electron optics, electron emission (field emission, thermionic emission), electron scattering (elastic/inelastic), backscattered electrons (BSE) and secondary electrons (SE) (convention: BSE > 50 eV; SE

Related standards

Other ISO standards

Overview

Key Topics

ISO 22493:2014 organizes and defines terms that underpin SEM practice. Representative technical topics and entries include:

Physical basis of SEM: electron optics, electron emission (field emission, thermionic emission), electron scattering (elastic/inelastic), backscattered electrons (BSE) and secondary electrons (SE) (convention: BSE > 50 eV; SE

ISO 22493:2014 PDF

Technical details

Abstract

Overview

Key Topics

Related standards

Abstract

Overview

Key Topics

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