ISO 29301:2023 PDF

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

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Title (English):

ISO 29301:2023

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

Document status:: Active
Format:: Electronic (PDF)
Number of pages:: 44
Publication date:: October 16, 2023
Edition:: ISO IS 29301 edition 3 version 1
ICS:: 37.020

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Description (English):

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Technical details

Technical committee: ISO/TC 202/SC 3 - Analytical electron microscopy
SKU: ISO 29301:2023

Abstract

Overview

ISO 29301:2023 - "Microbeam analysis - Analytical electron microscopy - Methods for calibrating image magnification by using reference materials with periodic structures" - specifies a standardized calibration procedure for image magnification in a transmission electron microscope (TEM). The standard applies to images recorded across a wide magnification range and to detectors such as photographic film, imaging plates, and digital image sensors (CCD/CMOS). It covers use of reference materials with periodic structures (diffraction grating replicas, super‑lattices, analysing crystals, crystal lattice images of carbon/gold/silicon) and includes scale bar calibration. ISO 29301:2023 is the third edition (minor revision) and does not apply to dedicated CD‑TEM or STEM instruments.

Key technical topics and requirements

Scope and definitions: formal definitions for image magnification, image file, HFW (horizontal field width), CRM/RM, alignment and related TEM terms.
Reference materials: requirements for certified reference materials (CRM) and reference materials (RM) with periodic structures, plus guidance on storage and handling.
Calibration workflow: structured procedures covering mounting CRM/RM, setting TEM operating conditions, capturing digitized images, and digitizing photographic film or imaging plates.
Measurement and digitization: procedures for selecting pixel resolution, digitizing reference scales (glass scale), and measuring angle‑corrected distances from digitized images.
Calibration computations: methods to determine pixel size, calibrate scale units, calculate image magnification, and calibrate displayed scale bars.
Quality and traceability: requirements for reporting, assessing accuracy, estimating measurement uncertainty, and producing a calibration report.
Supporting material: annexes include parameters that influence magnification, flowcharts, guidance on averaging lines, reference material lists, and example test reports.

Practical applications and who uses this standard

ISO 29301:2023 is intended for:

TEM operators and microscopy facilities performing quantitative imaging.
Calibration and metrology laboratories seeking traceable magnification measurements.
Research labs in materials science, semiconductors, nanotechnology, metallurgy, and biology that require accurate size measurements from TEM images.
Quality assurance teams and instrument vendors validating instrument performance.

Benefits include reproducible magnification calibration, improved measurement traceability, consistent scale bar accuracy, and better comparability of TEM-based dimensional data.

Related standards

ISO Guide 35 - Reference materials: characterization, homogeneity and stability.
ISO/IEC 17025:2017 - Competence of testing and calibration laboratories.
ISO 17034 - Competence of reference material producers.

Keywords: ISO 29301:2023, TEM magnification calibration, transmission electron microscope, reference materials, periodic structures, CRM, scale bar calibration, imaging plate, photographic film, image sensor.

Related standards

Mentioned in the description and other ISO standards

Abstract

Overview

Key technical topics and requirements

Scope and definitions: formal definitions for image magnification, image file, HFW (horizontal field width), CRM/RM, alignment and related TEM terms.
Reference materials: requirements for certified reference materials (CRM) and reference materials (RM) with periodic structures, plus guidance on storage and handling.
Calibration workflow: structured procedures covering mounting CRM/RM, setting TEM operating conditions, capturing digitized images, and digitizing photographic film or imaging plates.
Measurement and digitization: procedures for selecting pixel resolution, digitizing reference scales (glass scale), and measuring angle‑corrected distances from digitized images.
Calibration computations: methods to determine pixel size, calibrate scale units, calculate image magnification, and calibrate displayed scale bars.
Quality and traceability: requirements for reporting, assessing accuracy, estimating measurement uncertainty, and producing a calibration report.
Supporting material: annexes include parameters that influence magnification, flowcharts, guidance on averaging lines, reference material lists, and example test reports.

Practical applications and who uses this standard

ISO 29301:2023 is intended for:

TEM operators and microscopy facilities performing quantitative imaging.
Calibration and metrology laboratories seeking traceable magnification measurements.
Research labs in materials science, semiconductors, nanotechnology, metallurgy, and biology that require accurate size measurements from TEM images.
Quality assurance teams and instrument vendors validating instrument performance.

Benefits include reproducible magnification calibration, improved measurement traceability, consistent scale bar accuracy, and better comparability of TEM-based dimensional data.

Related standards

ISO Guide 35 - Reference materials: characterization, homogeneity and stability.
ISO/IEC 17025:2017 - Competence of testing and calibration laboratories.
ISO 17034 - Competence of reference material producers.

ISO 29301:2023 PDF

Technical details

Abstract

Overview

Key technical topics and requirements

Practical applications and who uses this standard

Related standards

Related standards

Abstract

Overview

Key technical topics and requirements

Practical applications and who uses this standard

Related standards

Related standards

General requirements for the competence of testing and calibration laboratories

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