ISO 3567:2011 PDF

Vacuum gauges — Calibration by direct comparison with a reference gauge

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Title (English):

ISO 3567:2011

Vacuum gauges — Calibration by direct comparison with a reference gauge

Document status:: Active
Format:: Electronic (PDF)
Number of pages:: 14
Publication date:: December 9, 2011
Edition:: ISO IS 3567 edition 1 version 1
ICS:: 23.160

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Description (English):

L'ISO 3567:2011 spécifie les conditions physiques, techniques et métrologiques à remplir lors de l'étalonnage de manomètres à vide par comparaison directe avec un manomètre de référence. La conception d'un appareil pouvant effectuer des étalonnages de manomètres à vide de manière appropriée peut être déduite des conditions décrites.

Technical details

Technical committee: ISO/TC 112 - Vacuum technology
SKU: ISO 3567:2011

Abstract

Overview

ISO 3567:2011 - "Vacuum gauges - Calibration by direct comparison with a reference gauge" defines the physical, technical and metrological conditions for calibrating vacuum gauges by exposing the unit under calibration (UUC) and a reference gauge to the same vacuum medium in a common calibration chamber. The standard supports reliable, traceable vacuum gauge calibration across a practical pressure range (from about 10 Pa to 110 kPa) and describes apparatus design, calibration procedures, uncertainty evaluation and reporting.

Key topics and technical requirements

Calibration principle: Direct comparison in a shared calibration chamber so the UUC and reference gauge experience the same gas density and velocity distribution (not only equal pressure).
Reference gauge: Must be traceable to a vacuum primary or national standard or be an absolute instrument; typically accompanied by a calibration certificate compliant with ISO/IEC 17025.
Calibration chamber design:
- Volume at least 20× the combined volume of all connected gauges and plumbing.
- Preferably cylindrical or spherical with axis symmetry and equatorial placement of entrance flanges.
- Temperature uniformity: spatial temperature differences

Related standards

Mentioned in the description and other ISO standards

Overview

Key topics and technical requirements

Calibration principle: Direct comparison in a shared calibration chamber so the UUC and reference gauge experience the same gas density and velocity distribution (not only equal pressure).
Reference gauge: Must be traceable to a vacuum primary or national standard or be an absolute instrument; typically accompanied by a calibration certificate compliant with ISO/IEC 17025.
Calibration chamber design:
- Volume at least 20× the combined volume of all connected gauges and plumbing.
- Preferably cylindrical or spherical with axis symmetry and equatorial placement of entrance flanges.
- Temperature uniformity: spatial temperature differences

ISO 3567:2011 PDF

Technical details

Abstract

Overview

Key topics and technical requirements

Related standards

Abstract

Overview

Key topics and technical requirements

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