Overview
IEC 62047-32:2019 is an international standard published by the International Electrotechnical Commission (IEC) that defines the test method for nonlinear vibration of MEMS resonators. This standard is part 32 of the IEC 62047 series, focused on semiconductor devices and micro-electromechanical systems (MEMS). It provides detailed methodologies and conditions to assess the nonlinear vibrational behavior of MEMS resonators, critical for their development and manufacturing processes.
The document standardizes how to measure key nonlinear vibration parameters including amplitude-frequency response, phase-frequency response, bending factors, amplitude thresholds for nonlinear jumps, and frequency deviations in closed-loop systems. Its application ensures consistency, reliability, and traceability in MEMS resonator performance evaluation.
Key Topics
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Nonlinear Vibration Testing
The standard specifies methods to test vibration where displacement correlates nonlinearly with elastic restoring forces. This nonlinear behavior is particularly relevant at high vibration amplitudes.
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Test Parameters
Important parameters defined include:
- Amplitude-frequency response (Aω)
- Phase-frequency response (Pω)
- Bending factor of amplitude-frequency response (b)
- Amplitude threshold for nonlinear jump (a)
- Frequency deviations in various closed-loop systems (self-exciting, phase-locked, burst-exciting)
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Test System Setup
The test system typically includes a laser vibrometer, micro-optical apparatus, signal generator, vacuum chamber, mounting fixtures, vacuum pump, and angle valve. Careful alignment and environmental control such as temperature (23 ±5 °C) and vacuum levels are required for accurate measurements.
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Test Procedures
Procedures cover frequency scanning near the natural resonant frequency, use of vacuum chambers to minimize external damping, and focusing lasers correctly for resonator displacement detection.
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Nonlinear Phenomena
Concepts like nonlinear jump-where the frequency response exhibits abrupt changes at specific amplitude thresholds-are addressed through modeling and experimental procedures.
Applications
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MEMS Resonator Design & Manufacturing
This standard is essential for designers and manufacturers who need to evaluate the dynamic nonlinear properties of MEMS resonators. It helps optimize performance, reliability, and device lifetime.
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Sensor Calibration
Frequency deviation analysis in closed-loop systems is crucial for sensors relying on resonant frequency stability. Understanding nonlinear vibrational effects aids in accuracy improvement of resonant MEMS sensors.
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Quality Control
Implementing this test method within quality management systems ensures consistent production of MEMS resonators meeting performance specifications.
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Research & Development
Provides a reference for researchers working on new MEMS device concepts, especially those aiming to manage or exploit nonlinear vibration behaviors.
Related Standards
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IEC 62047-1
Defines terms and definitions relevant to micro-electromechanical devices, providing foundational vocabulary for the entire IEC 62047 series.
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IEC 62047 Series
Covers a broad spectrum of semiconductor and MEMS device standards, providing complementary testing and specification documents for these technologies.
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ISO/IEC Directives
The standard is drafted according to these directives, ensuring globally accepted formatting, content structure, and procedural consistency.
Keywords: IEC 62047-32, nonlinear vibration, MEMS resonators, test method, amplitude-frequency response, phase-frequency response, bending factor, nonlinear jump, frequency deviation, semiconductor devices, micro-electromechanical systems, MEMS testing, resonator frequency stability, closed-loop system, vibration test standard.
Open preview (PDF)Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
